Publication Type:

Conference Paper

Source:

Conference Proceedings by the Society for Solid State and Electrochemical Science and Technology, The Electrochemical Society (2012)

Cite this Research Publication

Z. Karim, Yang, L., Mack, J., Liu, M., Weber, U., Baumann, P., Ramanathan S., Lu, B., Czubatyj, W., Hudgens, S., and , “Advances in ALD GST Process and Equipment for sub-20nm PCRAM Devices: Precursor delivery, GST Gapfill and Electrical Characterization”, in Conference Proceedings by the Society for Solid State and Electrochemical Science and Technology, 2012.