Publication Type:

Conference Paper


Proceedings-Electrochemical Society, Electrochemical Society, Volume PV 2005-05, p.282-292 (2005)


cited By 0; Conference of 207th ECS Meeting ; Conference Date: 16 May 2005 Through 20 May 2005; Conference Code:66433

Cite this Research Publication

J. Gutt, Dr. Sundararaman Gopalan, Brown, G. A., Kirsch, P. D., Peterson, J. J., Gardner, M. I., Li, H. - J., Lysaght, P., Alshareef, H. N., Choi, K., and , “ALD of advanced high-k and metal gate stacks for MOS devices”, in Proceedings-Electrochemical Society, 2005, vol. PV 2005-05, pp. 282-292.