Publication Type:

Conference Proceedings

Authors:

Ramanathan S.

Source:

Invited Talk at the 13th Atomic Layer Deposition Conference, American Vacuum Society (2013)

Cite this Research Publication

Ramanathan S., “Atomic Layer Deposition of Materials for Alternate Non-Volatile Memory Technologies”, Invited Talk at the 13th Atomic Layer Deposition Conference, American Vacuum Society. 2013.