Publication Type:

Conference Proceedings

Source:

International Conference on Atomic Layer Deposition, American Vacuum Society (2011)

Cite this Research Publication

L. Yang, Weber, U., Baumann, P. K., Mack, J., Karim, Z., Dr. Sasangan Ramanathan, and Lu, B., “Atomic Layer Deposition of Smooth Phase Change GexSbyTez Layers on Planar and 3D Structures”, International Conference on Atomic Layer Deposition, American Vacuum Society. 2011.