Publication Type:

Conference Paper


ECS (2003)


Cite this Research Publication

C. D. Young, Kerber, A., Hou, T. H., Cartier, E., Brown, G. A., Bersuker, G., Kim, Y., Lim, C., Gutt, J., Lysaght, P., Dr. Sundararaman Gopalan, and , “Charge trapping and mobility degradation in MOCVD hafnium silicate gate dielectric stack structures”, 2003.