Publication Type:

Conference Proceedings

Source:

12th International Conference on Atomic Layer Deposition, American Vacuum Society (2012)

Cite this Research Publication

L. Yang, Weber, U., Maumann, P. K., Karim, Z., Ramanathan S., Lu, B., Czubatyj, W., Hudgens, S., and Lowrey, T., “Deposition and Electrical Characterization of ALD GexSbyTez for Future Applications”, 12th International Conference on Atomic Layer Deposition, American Vacuum Society. 2012.