Publication Type:

Conference Proceedings

Source:

Proceedings of the 11th International Symposium on Integrated Ferroelectrics, Colorado Springs (1999)

Cite this Research Publication

Dr. Sundararaman Gopalan, Han, J. H., Balu, V., Lee, J. H., Mohemmedali, R., Wong, C. H., and Lee, J. C., “Effect of N2O on the RF-magnetron Sputtered SrTiO3 Films for ULSI DRAM Application”, Proceedings of the 11th International Symposium on Integrated Ferroelectrics. Colorado Springs, 1999.