Publication Type:

Journal Article


Applied physics letters, AIP Publishing, Volume 80, Number 23, p.4416–4418 (2002)

Cite this Research Publication

Dr. Sundararaman Gopalan, Onishi, K., Nieh, R., Kang, C. S., Choi, R., Cho, H. - J., Krishnan, S., and Lee, J. C., “Electrical and physical characteristics of ultrathin hafnium silicate films with polycrystalline silicon and TaN gates”, Applied physics letters, vol. 80, pp. 4416–4418, 2002.