Publication Type:

Conference Proceedings


Atomic Layer Deposition Conference (2005)

Cite this Research Publication

H. J. Lim, Kim, Y. S., Jung, H. S., Han, S. K., Kim, M. J., Lee, J. H., Lee, N. I., Chung, Y., Kim, H. Y., Lee, N. K., Dr. Sasangan Ramanathan, Seidel, T. E., and Boleslawski, M., “Evaluation od ALD Hafnium Silicate and Improvement of Reliability Characteristics”, Atomic Layer Deposition Conference. 2005.