Thin films of ferroelectric composite material comprising barium strontium titanate (BSTO) combined with magnesium oxide additive are produced by metalorganic decomposition. The barium strontium titanate magnesium oxide ferroelectric composite comprises Ba1-x Srx TiO3 /MgO, wherein x is greater than 0.0 but less than or equal to 0.75 and preferably is 0.4, and wherein the weight ratio of BSTO to magnesium oxide may range from 99 to 40 weight percent BSTO to 1 to 60 weight percent magnesium oxide. These films have desirable electronic properties and may have application to both active microwave and dynamic random access memory devices, including low dielectric constant, low loss factor, high tunability, and high resistivity. The films produced are uniformly thick and impurity free, with thicknesses of only 0.4 microns.
S. Sengupta, Stowell, S., Sengupta, L., Joshi, P. C., Dr. Sasangan Ramanathan, and Desu, S. B., “Ferroelectric Thin Film Composites made by Metalorganic Decomposition (Granted)”, U.S. Patent US Patent, 60715552000.