Publication Type:

Miscellaneous

Source:

(2006)

URL:

http://www.google.com/patents/US6989563

Abstract:

A method of protecting a charge trapping dielectric flash memory cell from UV-induced charging, including fabricating a charge trapping dielectric flash memory cell in a semiconductor device; depositing and planarizing an interlevel dielectric layer over the charge trapping dielectric flash memory cell and depositing over the planarized interlevel dielectric layer at least one UV-protective layer, the UV-protective layer including a substantially UV-opaque material.

Cite this Research Publication

K. Achuthan, Cheung, P. K., Tabery, C., Yang, J. Y., Cheng, N., and Van Ngo, M., “Flash memory cell with UV protective layer”. 2006.

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