Publication Type:

Conference Proceedings

Source:

Materials Research Society Spring Meeting (2009)

Cite this Research Publication

C. Barelli, . Y Kim, H., . Y Kim, G., Senzaki, Y., Okuyama, Y., Mack, J., Lindner, J., Lu, B., Karim, Z., and Dr. Sasangan Ramanathan, “Highly Conformal ALD of LaOx and La-based High-k Dielectric Films Using Novel Vaporizer Technology”, Materials Research Society Spring Meeting. 2009.

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