Publication Type:

Conference Paper


Device Research Conference, 2002. 60th DRC. Conference Digest (2002)

Cite this Research Publication

C. S Gopalan, Onishi, R., Nieh, K., Kang, R., Cho, C. S., Krishnan, H. - J., and Lee, J. C. S., “Impact of NH3 pre-treatment on the electrical and reliability characteristics of ultra thin hafnium silicate films prepared by re-oxidation method”, 2002.