Publication Type:

Conference Proceedings

Source:

MRS Symposium Proceedings, Cambridge Univ Press, Volume 101, p.449 (1987)

URL:

http://journals.cambridge.org/action/displayAbstract?fromPage=online&aid=8176732&fileId=S1946427400533296

Abstract:

We report the first results of experiments using a focused argon ion laser to locally induce chemical etching of steel and stainless steel in neutral salt solutions for maskless patterning. The solutions include sodium chloride, sodium nitrate and potassium sulfate. Vertical etch rates up to 4 microns/s are observed.

Cite this Research Publication

Dr. Madhav Datta, Romankiw, L. T., Vigliotti, D. R., and Von Gutfeld, R. J., “Laser Chemical Etching of Metals in Neutral Salt Solutions”, MRS Symposium Proceedings, vol. 101. Cambridge Univ Press, p. 449, 1987.

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