Publication Type:

Conference Proceedings

Source:

Symposium on Manufacturing and Technology Section MS2, American Vacuum Society (2011)

Cite this Research Publication

B. Lu, Karim, Z., and Dr. Sasangan Ramanathan, “Material and Tool Design Challenges for Taking ALD to High Volume Production Beyond 30nm Node”, Symposium on Manufacturing and Technology Section MS2, American Vacuum Society. 2011.