Publication Type:

Patent

Source:

Volume US7052969 B1, Number US 10/190,002 (2006)

URL:

http://www.google.com/patents/US7052969

Abstract:

<p>A method of manufacturing a planarized semiconductor wafer in which a semiconductor wafer is provided with a chemical-mechanical polishing stop layer deposited thereon. A photoresist layer is processed and used to form a patterned chemical-mechanical polishing stop layer and shallow trenches. A shallow trench isolation material is then grown on the chemical-mechanical polishing stop layer and in the shallow trenches, and is chemical-mechanical polished to the chemical-mechanical polishing stop layer.</p>

Cite this Research Publication

K. S. Sahota and Dr. Krishnashree Achuthan, “Method for semiconductor wafer planarization by isolation material growth”, U.S. Patent US 10/190,0022006.

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