Microfabrication by High Rate Anodic Dissolution: Fundamentals and Applications
Publication Type:Journal Article
Source:Electrochemical Society Transactions, Volume 66, Issue 22, p.1-18 (2015)
This paper presents a review of the basic principles of electrochemical metal removal processes and their application in microfabrication. After a brief description of anodic behavior of metals, the influence of mass transport, surface films and current distribution on microfabrication performance are discussed. Some examples of microelectronic component fabrication are presented that demonstrate the challenges and opportunities offered by high rate anodic dissolution processes.