Publication Type:

Conference Proceedings

Source:

Electrochemical Society, p.243-264 (2003)

Cite this Research Publication

A. R. Londergan, Dr. Sasangan Ramanathan, Winkler, J., Seidel, T. E., Gutt, J., Brown, G., and Murto, R. W., “PATHWAYS FOR ADVANCED TRANSISTORS USING HAFNIUM–BASED OXIDES BY ATOMIC LAYER DEPOSITION”, Electrochemical Society. pp. 243-264, 2003.