Publication Type:

Conference Paper

Source:

Low and High Dielectric Constant Materials: Materials Science, Processing, and Reliability Issues: Proceedings of the Fifth International Symposium, The Electrochemical Society (2000)

Cite this Research Publication

R. Nieh, Qi, W. - J., Lee, B. Hun, Kang, L., Jeon, Y., Onishi, K., Dr. Sundararaman Gopalan, Kang, C. Seok, Dharmarajan, E., Choi, R., and , “PROCESSING EFFECTS AND ELECTRICAL EVALUATION OF Z1O2 FORMED BY RTP OXIDATION OF Zr”, in Low and High Dielectric Constant Materials: Materials Science, Processing, and Reliability Issues: Proceedings of the Fifth International Symposium, 2000.

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