Publication Type:



Volume US5536388 A, Number US 08/460,439 (1996)



A nozzle is provided for use in electroetching a vertically oriented workpiece, comprising a housing having a top, sides, and bottom for creating a flow of etching solution on the workpiece, and means for shaping the flow of etching solution into a moving channel to improve etch uniformity of the workpiece.

Cite this Research Publication

T. E. Dinan, Berridge, K. G., Datta, M., Kanarsky, T. S., Pike, M. B., and Shenoy, R. V., “Vertical electroetch tool nozzle and method”, U.S. Patent US 08/460,4391996.