Publication Type:

Journal Article

Source:

Advanced Metallization and Interconnect Systems for ULSI Applications in 1997, p.635–640 (1997)

Cite this Research Publication

K. Achuthan, Hetherington, D. L., and Babu, S. V., “Wear rate characterization of CMP pads using laser scanning confocal microscopy”, Advanced Metallization and Interconnect Systems for ULSI Applications in 1997, pp. 635–640, 1997.