Publication Type:

Book Chapter

Source:

Advanced Nanoscale ULSI Interconnects: Fundamentals and Applications, Shacham-Diamand, Y., Osaka, T., Datta, M., Ohba, T., editors, Springer, p.63–71 (2009)

ISBN:

9780387958682

URL:

http://link.springer.com/chapter/10.1007/978-0-387-95868-2_4

Abstract:

Electrodeposition is the process of cathodic deposition of metals, alloys, and other conducting materials from an electrolyte using an external potential (electric current) for the cation reduction process to occur at the working substrate. The deposition process is also known as electrolytic plating, electroplating, or simply plating. Electrodeposition is widely employed in a variety of applications ranging from coatings for wear and corrosion resistance to nanoscale feature fabrication for ultra-large-scale integration (ULSI). The deposition thickness may vary from few angstroms of uniformly deposited compact films to electroformed structures that are millimeters thick. Compared to competing vacuum deposition processes, electrodeposition has emerged as more environmentally friendly and cost-effective micro/nanofabrication method.

Cite this Research Publication

Dr. Madhav Datta, “Electrodeposition”, in Advanced Nanoscale ULSI Interconnects: Fundamentals and Applications, Shacham-Diamand, Y., Osaka, T., Datta, M., Ohba, T., editors, Springer, 2009, pp. 63–71.

207
PROGRAMS
OFFERED
5
AMRITA
CAMPUSES
15
CONSTITUENT
SCHOOLS
A
GRADE BY
NAAC, MHRD
8th
RANK(INDIA):
NIRF 2018
150+
INTERNATIONAL
PARTNERS
  • Amrita on Social Media

  • Contact us

    Amrita Vishwa Vidyapeetham
    Amritanagar, Coimbatore - 641 112
    Tamilnadu, India
    • Fax: +91-422-2686274
    • Coimbatore : +91 (422) 2685000
    • Amritapuri   : +91 (476) 280 1280
    • Bengaluru    : +91 (080) 251 83700
    • Kochi              : +91 (484) 280 1234
    • Mysuru          : +91 (821) 234 3479
    • Contact Details »