Publication Type : Conference Proceedings
Publisher : The Electrochemical Society
Source : Conference Proceedings by the Society for Solid State and Electrochemical Science and Technology, The Electrochemical Society (2012)
Campus : Coimbatore
School : School of Engineering
Department : Chemical
Year : 2012
Abstract : Z. Karim, Yang, L., Mack, J., Liu, M., Weber, U., Baumann, P., Dr. Sasangan Ramanathan, Lu, B., Czubatyj, W., Hudgens, S., and , “Advances in ALD GST Process and Equipment for sub-20nm PCRAM Devices: Precursor delivery, GST Gapfill and Electrical Characterization”, in Conference Proceedings by the Society for Solid State and Electrochemical Science and Technology, 2012.
Cite this Research Publication : Z. Karim, Yang, L., Mack, J., Liu, M., Weber, U., Baumann, P., Dr. Sasangan Ramanathan, Lu, B., Czubatyj, W., Hudgens, S., and , “Advances in ALD GST Process and Equipment for sub-20nm PCRAM Devices: Precursor delivery, GST Gapfill and Electrical Characterization”, Conference Proceedings by the Society for Solid State and Electrochemical Science and Technology. The Electrochemical Society, 2012.