Publications

Abstract : We report TMA sensing characteristics of MoO3 thin films deposited using spray pyrolysis technique by varying the substrate temperatures from 523 to 623 K in steps of 50 K. An intermediate molybdenum composite was formed at 523 K, whereas it gets transformed to orthorhombic MoO3 at higher temperatures with golf ball-like morphology surrounded by interlocking loops. These thin films were highly selective and sensitive towards TMA vapor at room temperature. Also, the influence of grain boundary resistance and inter-granular activation energy of deposited thin films on TMA sensing properties has been investigated and reported. In particular, the film deposited at 623 K showed a minimum grain boundary resistance of 8.52 MΩ among other samples resulted in the maximum response of 27 towards 100 ppm of TMA at room temperature with the response and recovery times of 248 and 70 s respectively.