Unit 1
Micromachining – definition – principle of mechanical micromachining – Classification of micromachining and nanofinishing processes – Molecular dynamics simulations of machining at atomic scale. Diamond Turn Machining (DTM) – components of DTM – requirements of DTM – material removal mechanism – molecular dynamics – tool geometry. Abrasive Jet Micromachining – erosion mechanism – powder feeding – microstructure fabrication.Ultrasonic micromachining – basic elements – mechanism of material removal – micro- hole drilling, contour machining, micro-de-burring, machining of ceramic materials.Electrochemical micromachining.
Unit 2
Micro-electric discharge micromachining – principle – Micro EDM system development – process parameters – Analytical Modeling.Laser micromachining techniques and their applications.Focused Ion Beam machining. Electro chemical spark micromachining – mechanism – equipment. Electron beam micromachining – mechanism-process parameters – applications.
Unit 3
Microfabrication – Materials for Microsystems manufacture – Substrates and Wafers, active substrate materials, silicon and silicon components. Photolithography based micro fabrication processes – Photo resist development. Additive and subtractive techniques – CVD –PVD – etching – chemical, plasma – resists removal. Large aspect ratio micro manufacturing – LIGA, Deep Reactive Ion Etching.
Micro Metrology – Scanning Electron Microscopy, optical microscopy, atomic force microscope, molecular measuring machine, Micro-CMM, Transmission electron microscope – principles – applications.
