Back close

Course Detail

Course Name Micro-Manufacturing
Course Code 19MEE442
Program B. Tech. in Mechanical Engineering
Year Taught 2019


Unit 1

Micromachining – definition – principle of mechanical micromachining – Classification of micromachining and nanofinishing processes – Molecular dynamics simulations of machining at atomic scale. Diamond Turn Machining (DTM) – components of DTM – requirements of DTM – material removal mechanism – molecular dynamics – tool geometry. Abrasive Jet Micromachining – erosion mechanism – powder feeding – microstructure fabrication.Ultrasonic micromachining – basic elements – mechanism of material removal – micro- hole drilling, contour machining, micro-de-burring, machining of ceramic materials.Electrochemical micromachining.

Unit 2

Micro-electric discharge micromachining – principle – Micro EDM system development – process parameters – Analytical Modeling.Laser micromachining techniques and their applications.Focused Ion Beam machining. Electro chemical spark micromachining – mechanism – equipment. Electron beam micromachining – mechanism-process parameters – applications.

Unit 3

Microfabrication – Materials for Microsystems manufacture – Substrates and Wafers, active substrate materials, silicon and silicon components. Photolithography based micro fabrication processes – Photo resist development. Additive and subtractive techniques – CVD –PVD – etching – chemical, plasma – resists removal. Large aspect ratio micro manufacturing – LIGA, Deep Reactive Ion Etching.
Micro Metrology – Scanning Electron Microscopy, optical microscopy, atomic force microscope, molecular measuring machine, Micro-CMM, Transmission electron microscope – principles – applications.

Objectives and Outcomes

Course Objectives

  • To impart knowledge on principles and working of various micro-machining processes and its applications
  • To facilitate an understanding of micro-fabrication, micro metrology and its applications

Course Outcomes

  • CO1: Understand the basic concepts of micro-machining processes
  • CO2: select suitable micro-machining process for a given application
  • CO3: apply various micro-fabrication process for fabrication of a given component
  • CO4: Appreciate the requirements of various micro-metrological instruments

CO – PO Mapping

CO1 2 2 2
CO2 2 1 2 2
CO3 2 2 2 2
CO4 2 2 2

Textbook / References


  • Madou M. J. – ‘Fundamentals of Microfabrication’ – CRC Press – 2009 – 2nd Edition
  • Jain V. K. – ‘Introduction to Micromachining’ – Narosa Publishing House – 2010


  • Ran Hsu, T. R. ‘MEMS & Microsystems: Design and Manufacturing’ – Tata McGraw- Hill – 2002
  • Mohamed Gad-el-Hak – ‘The MEMS Handbook’ – CRC Press – 2002

Evaluation Pattern

Assessment Internal External
Periodical 1 (P1) 15
Periodical 2 (P2) 15
*Continuous Assessment (CA) 20
End Semester 50
*CA – Can be Quizzes, Assignment, Projects, and Reports.

DISCLAIMER: The appearance of external links on this web site does not constitute endorsement by the School of Biotechnology/Amrita Vishwa Vidyapeetham or the information, products or services contained therein. For other than authorized activities, the Amrita Vishwa Vidyapeetham does not exercise any editorial control over the information you may find at these locations. These links are provided consistent with the stated purpose of this web site.

Admissions Apply Now