| Course Name | Thin Film Physics |
| Course Code | 15PHY251 |
| Program | B. Tech. in Electrical and Electronics Engineering, B. Tech. in Civil Engineering, B. Tech. in Aerospace Engineering, B. Tech. in Chemical Engineering, B. Tech. in Mechanical Engineering, B. Tech. in Computer Science and Engineering |
| Year Taught | 2019 |
Introduction and preparation of thin film: Difference between thin and thick film. Appreciation of thin film technology in modern era. Deposition technology: Physical methods, chemical methods, other new techniques, vacuum technology: Vacuum pumps & pressure gauges.
Defects in thin film: General concepts, nature of defect, microscopic defect and dislocation. Boundary defects. Defect and energy states – donar acceptor levels, trap and recombination centers, excitons, phonons.
Thin film analysis: Structural studies: XRD and electron diffraction. Surface studies: electron microscopy studies on film (SEM, TEM, AFM) Film composition: X-ray photoelectron spectroscopy (XPS), Rutherford Back Scattering spectroscopy (RBS) and Secondary Ion Mass Spectroscopy (SIMS).
Properties of thin film: Optical behaviors: transmission, reflection, refractive index, photoconductivity, and photoluminescence.
Electrical behaviors: sheet resistivity, electron mobility and concentration, Hall effect, conduction in MIS structure.
Mechanical behaviors: stress, adhesion, hardness, stiffness.
Applications of thin films in various fields: Antireflection coating, FET, TFT, resistor, thermistor, capacitor, solar cell, and MEMs fabrication of silicon wafer: Introduction. preparation of the silicon wafer media, silicon wafer processing steps.
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