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Dynamic Scheduling of Diffusion Furnace in Semiconductor Manufacturing with Resource Related Real Time Events

Publication Type : Book Chapter

Publisher : Edited Volume of Analytics in Operations/Supply Chain Management, I.K International Publishing House Pvt. Ltd, New Delhi.

Source : Edited Volume of Analytics in Operations/Supply Chain Management, I.K International Publishing House Pvt. Ltd, New Delhi, p.367-381 (2016)

Campus : Bengaluru

School : School of Business

Department : Business

Year : 2016

Abstract : Most of the earlier research in dynamic scheduling of diffusion furnace (a Batch Processing Machine) in semiconductor manufacturing (SM) industry considers only future arrival of jobs. But in reality, along with the future arrival of jobs various inevitable and unpredictable real time events related to job as well as resources will happen and this should cause changes in the scheduled plan. This paper addresses dynamic scheduling of diffusion furnace considering future arrival of jobs along with resource-related real time events such as machine breakdown, operator illness, tool failure, shortage of material, defective material with an objective of minimizing the total weighted tardiness (TWT). In the literature, there are different algorithmic approaches are available on dynamic scheduling with real time events, particularly for discrete machine environment. To the best of our knowledge, these approaches change the current algorithm while the occurrence of real time events. In this study we hypothesis that no need to make different and/or modify the existing efficient dynamic scheduling algorithm(s) while resource-related real time events are occurring. This study proves the hypothesis proposed in this paper both empirically and statistically through a series of computational experiments.

Cite this Research Publication : Vimala Rani M and Mathirajan, M., “Dynamic Scheduling of Diffusion Furnace in Semiconductor Manufacturing with Resource Related Real Time Events”, in Edited Volume of Analytics in Operations/Supply Chain Management, I.K International Publishing House Pvt. Ltd, New Delhi, 2016, pp. 367-381.

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