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Course Detail

Course Name Micro-manufacturing
Course Code 15MEC269
Program B. Tech. in Mechanical Engineering
Year Taught 2019

Syllabus

Unit 1

Micromachining – definition – principle of mechanical micromachining – Classification of micromachining and nanofinishing processes – Molecular dynamics simulations of machining at atomic scale.

Diamond Turn Machining (DTM) – components of DTM – requirements of DTM – material removal mechanism – molecular dynamics – tool geometry. Abrasive Jet Micromachining – erosion mechanism – powder feeding – microstructure fabrication. Ultrasonic micromachining – basic elements – mechanism of material removal – micro-hole drilling, contour machining, micro-de-burring, machining of ceramic materials. Electrochemical micromachining.

Unit 2

Micro-electric discharge micromachining – principle – Micro EDM system development – process parameters – Analytical Modeling. Laser micromachining techniques and their applications. Focused Ion Beam machining. Electro chemical spark micromachining – mechanism – equipment. Electron beam micromachining – mechanism-process parameters – applications.

Unit 3

Microfabrication – Materials for Microsystems manufacture – Substrates and Wafers, active substrate materials, silicon and silicon components. Photolithography based micro fabrication processes – Photo resist development. Additive and subtractive techniques – CVD – PVD – etching – chemical, plasma – resists removal. Large aspect ratio micro manufacturing – LIGA, Deep Reactive Ion Etching.

Micro Metrology – Scanning Electron Microscopy, optical microscopy, atomic force microscope, molecular measuring machine, Micro-CMM, Transmission electron microscope – principles – applications.

Text Books

  • Madou M. J. – ‘Fundamentals of Microfabrication’ – CRC Press – 2009 – 2nd Edition
  • Jain V. K. – ‘Introduction to Micromachining’ – Narosa Publishing House – 2010

Resources

  • Ran Hsu, T. R. ‘MEMS & Microsystems: Design and Manufacturing’ – Tata McGraw- Hill – 2002
  • Mohamed Gad-el-Hak – ‘The MEMS Handbook’ – CRC Press – 2002

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