Micro-manufacturing

Unit 1

Micromachining – definition - principle of mechanical micromachining - Classification of micromachining and nanofinishing processes - Molecular dynamics simulations of machining at atomic scale.

Diamond Turn Machining (DTM) - components of DTM – requirements of DTM - material removal mechanism – molecular dynamics - tool geometry. Abrasive Jet Micromachining - erosion mechanism - powder feeding - microstructure fabrication. Ultrasonic micromachining – basic elements - mechanism of material removal - micro-hole drilling, contour machining, micro-de-burring, machining of ceramic materials. Electrochemical micromachining.

Unit 2

Micro-electric discharge micromachining – principle - Micro EDM system development - process parameters - Analytical Modeling. Laser micromachining techniques and their applications. Focused Ion Beam machining. Electro chemical spark micromachining – mechanism - equipment. Electron beam micromachining – mechanism-process parameters - applications.

Unit 3

Microfabrication - Materials for Microsystems manufacture - Substrates and Wafers, active substrate materials, silicon and silicon components. Photolithography based micro fabrication processes - Photo resist development. Additive and subtractive techniques – CVD – PVD – etching - chemical, plasma - resists removal. Large aspect ratio micro manufacturing - LIGA, Deep Reactive Ion Etching.

Micro Metrology - Scanning Electron Microscopy, optical microscopy, atomic force microscope, molecular measuring machine, Micro-CMM, Transmission electron microscope – principles - applications.