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Learning Objectives

  • LO1: To introduce the basics of MEMS
  • LO2: To provide understanding fabrication of BioMEMS
  • LO3: To impart knowledge on biomedical applications of MEMS

Course Outcomes

  • CO1: Ability to understand the operation of micro devices, micro systems, and their application
  • CO2: Ability to design the micro devices, micro systems using the MEMS fabrication process
  • CO3: Ability to analyse the optic MEMS applications in bioengineering
  • CO4: Ability to evaluate the performance of MEMS in diagnostic applications

Course Contents

History of BioMEMS – overview of the different types of MEMS and microsystems, Smart systems and 3D architectures. Current state of the art and trends at the academic and industrial levels. Micropatterning of substrates and cells – Microfluidics – Molecular biology on a Chip – Cell-based chips for biotechnology – BioMEMS for cell biology – Tissue microengineering

MEMS for biomedical sensing and diagnostic applications – MEMS for in vivo sensing – MEMS and Electrical Impedance Spectroscopy (EIS) for non-invasive measurement of cells – MEMS ultrasonic transducers for biomedical applications – BioMEMS for drug delivery applications – BioMEMS for drug delivery applications – Applications of MEMS technologies for minimally invasive medical procedures – Smart microgrippers for bioMEMS applications.

Optical bio-sensing applications – Colorimetric detection – Fluorescence detection – Luminescence detection – Bioluminescence detection – Chemiluminescence detection – Bio chemiluminescence detection – Electrochemiluminescence detection.


  1. Albert Folch, Introduction to BioMEMS, CRC Press, 2013.
  2. Shekhar Bhansali and Abhay Vasudev, MEMS for Biomedical Applications, Woodhead Publishing Limited, 2012.
  3. Samira Hosseini, Michelle Alejandra Espinosa-Hernandez, Ricardo Garcia-Ramirez, Ana Sofia Cerda-Kipper, Sofia Reveles-Huizar, Luis Acosta-Soto, BioMEMS – Biosensing Applications, Springer, 2021.

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