Back close

Course Detail

Course Name Micro-Electro Mechanical Systems
Course Code 15MEC238
Program B. Tech. in Mechanical Engineering
Year Taught 2019


Unit 1

Definition of MEMS. MEMS devices. Silicon as a MEMS material – mechanical properties of silicon. Mechanical components in MEMS. Design concepts of mechanical components. Working Principles of Microsystems. Engineering Science for Microsystems design and Fabrication. Scaling laws – Scaling in geometry, rigid body dynamics, electrostatic forces, electromagnetic forces, electricity-fluid mechanics and heat transfer.

Unit 2

Materials for MEMS and Microsystems. Fabrication technologies – Photolithography – Ion implantation – diffusion – oxidation – CVD – Physical Vapor Deposition – Etching.

Micro manufacturing – Bulk and surface micro machining – LIGA.

Unit 3

Microsystems Design – Design considerations – Process design – Mechanical Design – CAD – Micro system packaging – Levels – Bonding – Interfaces – Assembly – Selection of Packaging Materials.

Text Books

  • Tai–Ran Hsu – ‘Mems & Microsystems Design and Manufacturing’ – John Wiley & Sons – 2008 – 2nd Edition


  • Marc J Madou – ‘Fundamentals of Microfabrication’ – CRC Press – 2002 – 2nd Edition
  • Mohamed Gad-el-Hak – ‘The MEMS Handbook’ – CRC Press – 2002

DISCLAIMER: The appearance of external links on this web site does not constitute endorsement by the School of Biotechnology/Amrita Vishwa Vidyapeetham or the information, products or services contained therein. For other than authorized activities, the Amrita Vishwa Vidyapeetham does not exercise any editorial control over the information you may find at these locations. These links are provided consistent with the stated purpose of this web site.

Admissions Apply Now