| Course Name | Micro-Electro Mechanical Systems |
| Course Code | 15MEC238 |
| Program | B. Tech. in Mechanical Engineering |
| Year Taught | 2019 |
Definition of MEMS. MEMS devices. Silicon as a MEMS material – mechanical properties of silicon. Mechanical components in MEMS. Design concepts of mechanical components. Working Principles of Microsystems. Engineering Science for Microsystems design and Fabrication. Scaling laws – Scaling in geometry, rigid body dynamics, electrostatic forces, electromagnetic forces, electricity-fluid mechanics and heat transfer.
Materials for MEMS and Microsystems. Fabrication technologies – Photolithography – Ion implantation – diffusion – oxidation – CVD – Physical Vapor Deposition – Etching.
Micro manufacturing – Bulk and surface micro machining – LIGA.
Microsystems Design – Design considerations – Process design – Mechanical Design – CAD – Micro system packaging – Levels – Bonding – Interfaces – Assembly – Selection of Packaging Materials.
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