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Electrical characteristics of highly reliable ultrathin hafnium oxide gate dielectric

Publication Type : Journal Article

Publisher : Electron Device Letters, IEEE

Source : Electron Device Letters, IEEE, IEEE, Volume 21, Number 4, p.181–183 (2000)

Campus : Amritapuri

School : School of Engineering

Department : Electronics and Communication

Year : 2000

Abstract :

Cite this Research Publication :
L. Kang, Lee, B. Hun, Qi, W. - J., Jeon, Y., Nieh, R., Dr. Sundararaman Gopalan, Onishi, K., and Lee, J. C., “Electrical characteristics of highly reliable ultrathin hafnium oxide gate dielectric”, Electron Device Letters, IEEE, vol. 21, pp. 181–183, 2000

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