Publication

Abstract : In this section, we are going to cover the overall content of semiconductor processes required in university or graduate programs, or in the semiconductor industry. In this first chapter, the eight major semiconductor processes will be comprehensively covered for understanding the recent semiconductor technology. Therefore, this chapter will briefly introduce eight major semiconductor fabrication processes – wafer manufacturing, oxidation, photolithography, etching, ion implantation, chemical vapor deposition (CVD), metallization, and packaging. For this purpose, the authors have used middle school level chemistry knowledge and described the overall latest semiconductor processes as easy to understand and intuitive as possible. This chapter is written for the purpose of education and research.