HomePublicationsSystem for Optical Beam Steering Using Vertically Actuated MEMS Grating Coupler
System for Optical Beam Steering Using Vertically Actuated MEMS Grating Coupler
Publication Type : Patents
Source : Indian Patent 605631
Year : 2026
Abstract :
Cite this Research Publication : Indian Patent 605631 SYSTEM FOR OPTICAL BEAM STEERING USING VERTICALLY ACTUATED MEMS GRATING COUPLER granted on October 12, 2026 (M77)
