Definition of MEMS. MEMS devices. Silicon as a MEMS material - mechanical properties of silicon. Mechanical components in MEMS. Design concepts of mechanical components. Working Principles of Microsystems. Engineering Science for Microsystems design and Fabrication. Scaling laws – Scaling in geometry, rigid body dynamics, electrostatic forces, electromagnetic forces, electricity-fluid mechanics and heat transfer.
Materials for MEMS and Microsystems. Fabrication technologies – Photolithography - Ion implantation – diffusion – oxidation – CVD - Physical Vapor Deposition – Etching.
Micro manufacturing - Bulk and surface micro machining - LIGA.
Microsystems Design - Design considerations - Process design - Mechanical Design – CAD - Micro system packaging – Levels – Bonding – Interfaces - Assembly – Selection of Packaging Materials.