COURSE SUMMARY
Course Title: 
Micro-Electro Mechanical Systems
Course Code: 
15MEC238
Year Taught: 
2015
2016
2017
2018
Type: 
Elective
Degree: 
Undergraduate (UG)
School: 
School of Engineering
Campus: 
Bengaluru
Chennai
Coimbatore
Amritapuri

'Micro-Electro Mechanical Systems' is a course offered in the B. Tech. in Mechanical Engineering program at School of Engineering, Amrita Vishwa Vidyapeetham.

Unit 1

Definition of MEMS. MEMS devices. Silicon as a MEMS material - mechanical properties of silicon. Mechanical components in MEMS. Design concepts of mechanical components. Working Principles of Microsystems. Engineering Science for Microsystems design and Fabrication. Scaling laws – Scaling in geometry, rigid body dynamics, electrostatic forces, electromagnetic forces, electricity-fluid mechanics and heat transfer.

Unit 2

Materials for MEMS and Microsystems. Fabrication technologies – Photolithography - Ion implantation – diffusion – oxidation – CVD - Physical Vapor Deposition – Etching.

Micro manufacturing - Bulk and surface micro machining - LIGA.

Unit 3

Microsystems Design - Design considerations - Process design - Mechanical Design – CAD - Micro system packaging – Levels – Bonding – Interfaces - Assembly – Selection of Packaging Materials.

  • Tai–Ran Hsu - ‘Mems & Microsystems Design and Manufacturing’ - John Wiley & Sons - 2008 - 2nd Edition
  • Marc J Madou - ‘Fundamentals of Microfabrication’ - CRC Press - 2002 - 2nd Edition
  • Mohamed Gad-el-Hak – ‘The MEMS Handbook’ - CRC Press - 2002