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Course Detail

Course Name Micro-Electro Mechanical Systems
Course Code 15MEC238
Program B. Tech. in Mechanical Engineering
Year Taught 2019

Syllabus

Unit 1

Definition of MEMS. MEMS devices. Silicon as a MEMS material – mechanical properties of silicon. Mechanical components in MEMS. Design concepts of mechanical components. Working Principles of Microsystems. Engineering Science for Microsystems design and Fabrication. Scaling laws – Scaling in geometry, rigid body dynamics, electrostatic forces, electromagnetic forces, electricity-fluid mechanics and heat transfer.

Unit 2

Materials for MEMS and Microsystems. Fabrication technologies – Photolithography – Ion implantation – diffusion – oxidation – CVD – Physical Vapor Deposition – Etching.

Micro manufacturing – Bulk and surface micro machining – LIGA.

Unit 3

Microsystems Design – Design considerations – Process design – Mechanical Design – CAD – Micro system packaging – Levels – Bonding – Interfaces – Assembly – Selection of Packaging Materials.

Text Books

  • Tai–Ran Hsu – ‘Mems & Microsystems Design and Manufacturing’ – John Wiley & Sons – 2008 – 2nd Edition

Resources

  • Marc J Madou – ‘Fundamentals of Microfabrication’ – CRC Press – 2002 – 2nd Edition
  • Mohamed Gad-el-Hak – ‘The MEMS Handbook’ – CRC Press – 2002

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