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Course Detail

Course Name Thin Film Technology
Course Code 22PHY543

Syllabus

Unit 1

Preparation Methods
Learning Objectives
Understand about the various physical and chemical deposition metods

Physical methods: Thermal evaporation, Cathodic sputtering, Molecular beam epitaxy and Laser ablation methods.
Chemical methods: Electrolytic deposition, Chemical vapor deposition.

Unit 2

Thickness Measurement and Characterization
Learning Objectives
Understand the principle in measuring the thickness of thin films and to find a suitable method for measuring the thickness of thin films.
Understand and analyze the characteristics of thin films using different instrumentation technique.

Electrical, Mechanical, Optical, Microbalance, Quartz crystal methods.
Analytical techniques of characterization: X-ray diffraction, Electron microscopy, High and low energy electron diffraction, Auger emission spectroscopy.

Unit 3

Growth and Structure of Films
Learning Objectives
Able to understand the nucleation theories leading to the growth.
Able to understand different types of growth mechanisms in the growth of thin films
Understand, analyze and treating the Structural defects in thin films.
General Features, Nucleation theories, Effect of electron bombardment on film structure, Post-nucleation growth, Epitaxial film growth, Structural defects.

Unit 4

Properties of Thin Films
Learning Objectives
Understanding the mechanical behavior of thin films.
Understanding and calculating the optical constants of thin films and hence draw the conclusions regarding the optical behavior of thin films.
Understanding he electrical and superconducting behavior of thin films and hence to draw a valuable conclusion regarding the properties of the material

Mechanical properties: Elastic and Plastic behavior.
Optical properties: Reflectance and transmittance spectra, Absorbing films, Optical constants of film material, Multilayer films, Anisotropic and isotropic films.
Electrical properties: Conductivity in metal, Semiconductor and Insulating films, Discontinuous films, Superconducting films.

Unit 5

Magnetic Properties of Thin Films and Thin Film Devices
Learning Objectives
Understanding the theories of magnetism and the application of magnetic thin films in various fields.
Understanding the working principle of thin film devices and the fabrication and application of thin film devices.

Molecular field theory, Spin wave theory, Anisotropy in magnetic thin films, Domains in thin films, Applications of magnetic thin films.
Thin film devices: Fabrication and applications.

Objectives

Prerequisite: Solid State Physics

Course Objectives: To make the students to understand about the difference between bulk and thin film, the optical, electrical, dielectric and magnetic properties of thin film, the theories explaining the formation of thin film and the fabrication and advantages of thin film devices.

Course Outcomes
At the end of the course students will be able to
CO1. To understand the principle, differences and similarities, advantages, and disadvantages of different thin film deposition Techniques.
CO2. To understand and evaluate and use models for understanding nucleation and growth of thin films.
CO3. To understand about different instrumentation techniques and to analyze thin film properties to apply for various applications.
CO4. To improve problems solving skills related to evaluation of different properties of thin films.

CO-PO Mapping

PO1 PO2 PO3 PO4 PO5 PSO1 PSO2 PSO3 PSO4
CO1 1 2 2
CO2 1 2 2
CO3 1 2 2 2 2
CO4 1 2 2 2 2

Text books & References

Text books

  1. K.L. Chopra, “Thin Film Phenomena”, First Edition, McGraw-Hill, 1969.
  2. George Hass, “Physics of Thin Films”, Volumes 1, Academic Press Inc., 1963.

References

  1. K. L. Chopra and S. R. Das, “Thin Film Solar Cells”, Springer, 1983.
  2. L. I. Maissel and Glang, “Handbook of Thin Film Technology”, McGraw Hill Higher Education, 1970.
  3. J. C. Anderson, “The Use of Thin Films in Physical Investigation”, Academic Press Inc., 1966.
  4. J. J. Coutts, “Active and Passive Thin Film Devices”, Academic Press Inc., 1978.
  5. R.W. Berry, P.M. Hall and M.T. Harris, “Thin Film Technology”, Van Nostrand, 1968.

Evaluation Pattern

Assessment Internal External Semester
Periodical 1 (P1) 15
Periodical 2 (P2) 15
*Continuous Assessment (CA) 20
End Semester 50

*CA – Can be Quizzes, Assignments, Projects, and Reports.

Justification for CO-PO Mapping

Mapping Justification Affinity level
CO1-PO1 CO1 is related to understanding the principle, differences and similarities, advantages and disadvantages of different thin film deposition methods it require the basic knowledge regarding the differences between the thin and thick film and the basic knowledge regarding the deposition so it is related to PO1 1
CO1-PO2 As CO1 is related to the basic understanding regarding the differences between thick and thin film and the parameters adjusted to get a uniform thickness thin film, it requires the analyzing capacity of the students to go for a suitable method of preparation and so it is related to PO2. 2
CO2-PO1 CO2 is related to evaluation and use of models for understanding nucleation and growth of thin films it requires the basic knowledge of various nucleation theories and so it is related to PO1 1
CO2-PO2 As CO2 is the understanding and evaluation of different nucleation models for the growth of the thin films it requires the analyzing skills of the students regarding the nucleation theories and to find the radius of the nuclei and hence draw conclusions and hence it is related to PO2. 2
CO3-PO1 CO3 is related to analyzing the thin film properties for various applications the students should know the basic knowledge in selecting the suitable material with properties foe suitable applications, so it is related to PO1. 1
CO3-PO2 The application of thin films depends on the thin film properties; students should analyse the material properties for suitable applications so CO3 is related to PO2. 2
CO3-PO3 Application of thin films are based on the material properties students should know the proper selection of the material for suitable applications with appropriate consideration for the public health and safety and environmental considerations. So CO3 is related to PO3. 2
CO3-PO4 The analysis of thin film properties to apply for various applications includes the use of research-based knowledge and research methods including design of experiments, analysis and interpretation of data, and synthesis of the information to provide valid conclusions. So CO3 is related to PO4. 2
CO4-PO1 To improve problems solving skills related to evaluation of different properties of thin films it requires basic knowledge regarding the physics of thin films. So CO4 it is related PO1. 1
CO4-PO2 To improve different properties of thin films students should be able to identify and analyze the problems so that they can formulate the synthesis process. So CO4 is related to PO2. 2
CO4-PO3 To improve the knowledge in the evaluation of different properties of thin films one should be able to design solutions for complex chemical process problems and evolve procedures that meet the specified needs with appropriate consideration for the public health and safety and environmental considerations. So CO4 is related to PO3. 2
CO4-PO4 The problem-solving skills in tuning and improving the properties of thin films require the use of research-based knowledge and research methods including design of experiments, analysis and interpretation of data, and synthesis of the information to provide valid conclusions. So CO4 is related to PO4. 2
CO1-PSO3 To understand the principle, differences and similarities, advantages and disadvantages of different thin film deposition methods. After gaining the knowledge Students will acquire experimental skills which enable them to take precise measurements in labs and analyze the measurements to draw valid conclusions. In addition, students will exhibit skills in solving problems using computer programming, plotting tools, and related software. SoCO1 is related to PO3 2
CO2-PSO3 By understanding nucleation theories Students will acquire skills which enable them to analyze it to draw valid conclusions. In addition, students will exhibit skills in solving problems using computer programming, plotting tools, and related software 2
CO3-PSO3 After getting the knowledge to analyze thin film properties to apply for various applications Students will acquire experimental skills which enable them to take precise measurements and analyze the measurements to draw valid conclusions. In addition, students will exhibit skills in solving problems using computer programming, plotting tools, and related software 2
CO4-PSO3 After improving the problems solving skills in the of different properties of thin films students will acquire experimental skills in measurements and analyze the measurements to draw valid conclusions. In addition, students will exhibit skills in solving problems using computer programming, plotting tools, and related software. 2

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