Publication Type : Conference Proceedings
Publisher : The Electrochemical Society, Meeting Abstracts
Source : The Electrochemical Society, Meeting Abstracts, Volume 12, p.487 (2006)
Campus : Coimbatore
School : School of Engineering
Department : Chemical
Verified : Yes
Year : 2006
Abstract :
Cite this Research Publication : M. Schumacher, Dr. Sasangan Ramanathan, Baumann, P. K., J. Linder, Lohe, C., Weber, U., Karim, Z., Londergan, A. R., and Seidel, T. E., “Atomic Vapor Deposition for Next Generation of Advanced Semiconductor Devices”, The Electrochemical Society, Meeting Abstracts, vol. 12. p. 487, 2006.