Publication Type : Conference Proceedings
Publisher : American Vacuum Society
Source : 12th International Conference on Atomic Layer Deposition, American Vacuum Society (2012)
Campus : Coimbatore
School : School of Engineering
Department : Chemical
Year : 2012
Abstract :
Cite this Research Publication : L. Yang, Weber, U., Maumann, P. K., Karim, Z., Dr. Sasangan Ramanathan, Lu, B., Czubatyj, W., Hudgens, S., and Lowrey, T., “Deposition and Electrical Characterization of ALD GexSbyTez for Future Applications”, 12th International Conference on Atomic Layer Deposition, American Vacuum Society. 2012.