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Development of Next Generation High-k Filmss – Challenges and Solutions

Publication Type : Conference Proceedings

Publisher : European Materials Research Society Spring Meeting

Source : European Materials Research Society Spring Meeting. France, 2009.

Campus : Coimbatore

School : School of Engineering

Department : Chemical

Year : 2009

Abstract :

Cite this Research Publication : Dr. Sasangan Ramanathan, “Development of Next Generation High-k Filmss – Challenges and Solutions”, European Materials Research Society Spring Meeting. France, 2009.

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