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Effect of N2O on the RF-magnetron Sputtered SrTiO3 Films for ULSI DRAM Application

Publication Type : Conference Proceedings

Publisher : Proceedings of the 11th International Symposium on Integrated Ferroelectrics, Colorado Springs

Source : Proceedings of the 11th International Symposium on Integrated Ferroelectrics, Colorado Springs (1999)

Campus : Amritapuri

School : School of Engineering

Department : Electronics and Communication

Year : 1999

Abstract :

Cite this Research Publication :
Dr. Sundararaman Gopalan, Han, J. H., Balu, V., Lee, J. H., Mohemmedali, R., Wong, C. H., and Lee, J. C., “Effect of N2O on the RF-magnetron Sputtered SrTiO3 Films for ULSI DRAM Application”, Proceedings of the 11th International Symposium on Integrated Ferroelectrics. Colorado Springs, 1999.

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