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Evaluation of ALD Hafnium Silicate and Improvement of Reliability Characteristics

Publication Type : Conference Proceedings

Publisher : Atomic Layer Deposition Conference

Source : Atomic Layer Deposition Conference (2005)

Campus : Coimbatore

School : School of Engineering

Department : Chemical

Verified : Yes

Year : 2005

Abstract :

Cite this Research Publication : H. J. Lim, Kim, Y. S., Jung, H. S., Han, S. K., Kim, M. J., Lee, J. H., Lee, N. I., Chung, Y., Kim, H. Y., Lee, N. K., Dr. Sasangan Ramanathan, Seidel, T. E., and Boleslawski, M., “Evaluation od ALD Hafnium Silicate and Improvement of Reliability Characteristics”, Atomic Layer Deposition Conference. 2005.

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