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Needs for Next Generation Memory and Enabling Solutions based on Advanced Vaporizer Technology

Publication Type : Conference Proceedings

Publisher : 9th Atomic Layer Deposition Conference, American Vacuum Society

Source : 9th Atomic Layer Deposition Conference, American Vacuum Society. 2009.

Campus : Coimbatore

School : School of Engineering

Department : Chemical

Year : 2009

Abstract :

Cite this Research Publication : Z. Karim, Senzaki, Y., . Y Kim, G., Barelli, C., Okuyama, Y., Kim, H. Y., Lu, B., Lindner, J., and Dr. Sasangan Ramanathan, “Needs for Next Generation Memory and Enabling Solutions based on Advanced Vaporizer Technology”, 9th Atomic Layer Deposition Conference, American Vacuum Society. 2009.

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