Publication Type : Conference Proceedings
Publisher : 9th Atomic Layer Deposition Conference, American Vacuum Society
Source : 9th Atomic Layer Deposition Conference, American Vacuum Society. 2009.
Campus : Coimbatore
School : School of Engineering
Department : Chemical
Year : 2009
Abstract :
Cite this Research Publication : Z. Karim, Senzaki, Y., . Y Kim, G., Barelli, C., Okuyama, Y., Kim, H. Y., Lu, B., Lindner, J., and Dr. Sasangan Ramanathan, “Needs for Next Generation Memory and Enabling Solutions based on Advanced Vaporizer Technology”, 9th Atomic Layer Deposition Conference, American Vacuum Society. 2009.