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PATHWAYS FOR ADVANCED TRANSISTORS USING HAFNIUM–BASED OXIDES BY ATOMIC LAYER DEPOSITION

Publication Type : Conference Proceedings

Publisher : Electrochemical Society

Source : Electrochemical Society, p.243-264 (2003)

Campus : Coimbatore

School : School of Engineering

Department : Chemical

Year : 2003

Abstract :

Cite this Research Publication : A. R. Londergan, Dr. Sasangan Ramanathan, Winkler, J., Seidel, T. E., Gutt, J., Brown, G., and Murto, R. W., “PATHWAYS FOR ADVANCED TRANSISTORS USING HAFNIUM–BASED OXIDES BY ATOMIC LAYER DEPOSITION”, Electrochemical Society. pp. 243-264, 2003.

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