Publication Type : Conference Proceedings
Publisher : Electrochemical Society
Source : Electrochemical Society, p.243-264 (2003)
Campus : Coimbatore
School : School of Engineering
Department : Chemical
Year : 2003
Abstract :
Cite this Research Publication : A. R. Londergan, Dr. Sasangan Ramanathan, Winkler, J., Seidel, T. E., Gutt, J., Brown, G., and Murto, R. W., “PATHWAYS FOR ADVANCED TRANSISTORS USING HAFNIUM–BASED OXIDES BY ATOMIC LAYER DEPOSITION”, Electrochemical Society. pp. 243-264, 2003.