Publication Type : Journal Article
Publisher : Electrochemical and Solid-State Letters
Source : Electrochemical and Solid-State Letters, The Electrochemical Society, Volume 3, Number 8, p.389–391 (2000)
Campus : Amritapuri
School : School of Engineering
Department : Electronics and Communication
Year : 2000
Abstract :
Cite this Research Publication : A. Lucas, Dr. Sundararaman Gopalan, Lee, J. C., Kaushal, S., Niino, R., and Tada, Y., “Ultrathin Gate Oxynitrides Grown Using Fast Ramp Vertical Furnace for Sub-130 Nanometer Technology”, Electrochemical and Solid-State Letters, vol. 3, pp. 389–391, 2000.