Publication Type : Journal Article
Source : (2006)
Url : http://www.google.com/patents/US6989563
Keywords :
Campus : Amritapuri
School : School of Engineering
Center : TBI
Department : cyber Security
Year : 2006
Abstract : A method of protecting a charge trapping dielectric flash memory cell from UV-induced charging, including fabricating a charge trapping dielectric flash memory cell in a semiconductor device; depositing and planarizing an interlevel dielectric layer over the charge trapping dielectric flash memory cell and depositing over the planarized interlevel dielectric layer at least one UV-protective layer, the UV-protective layer including a substantially UV-opaque material.
Cite this Research Publication : K. Achuthan, Cheung, P. K., Tabery, C., Yang, J. Y., Cheng, N., and Van Ngo, M., “Flash memory cell with UV protective layer”. 2006.