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Impact of NH3 pre-treatment on the electrical and reliability characteristics of ultra thin hafnium silicate films prepared by re-oxidation method

Publication Type : Conference Paper

Publisher : 60th DRC. Conference Digest

Source : Device Research Conference, 2002. 60th DRC. Conference Digest (2002)

Campus : Amritapuri

School : School of Engineering

Department : Electronics and Communication

Year : 2002

Abstract :

Cite this Research Publication : C. S Gopalan, Onishi, R., Nieh, K., Kang, R., Cho, C. S., Krishnan, H. - J., and Lee, J. C. S., “Impact of NH3 pre-treatment on the electrical and reliability characteristics of ultra thin hafnium silicate films prepared by re-oxidation method”, 2002.

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