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Modulating Work Function for pFET with AVD Ru-based and TaN-based Gate Electrodes

Publication Type : Conference Proceedings

Publisher : 39th IEEE Semiconductor Interface Specialist Conference

Source : 39th IEEE Semiconductor Interface Specialist Conference. 2008.

Campus : Coimbatore

School : School of Engineering

Department : Chemical

Year : 2008

Abstract :

Cite this Research Publication : C. Choi, Ando, T., Karim, Z., and Dr. Sasangan Ramanathan, “Modulating Work Function for pFET with AVD Ru-based and TaN-based Gate Electrodes”, 39th IEEE Semiconductor Interface Specialist Conference. 2008.

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