Micromachining – definition - principle of mechanical micromachining - Classification
of micromachining and nanofinishing processes - Molecular dynamics simulations
of machining at atomic scale.
Diamond Turn Machining (DTM) - components of DTM – requirements of DTM -
material removal mechanism – molecular dynamics - tool geometry. Abrasive Jet
Micromachining - erosion mechanism - powder feeding - microstructure fabrication.
Ultrasonic micromachining – basic elements - mechanism of material removal -
micro-hole drilling, contour machining, micro-de-burring, machining of ceramic
materials. Electrochemical micromachining.
Micro-electric discharge micromachining – principle - Micro EDM system development
- process parameters - Analytical Modeling. Laser micromachining techniques and
their applications. Focused Ion Beam machining. Electro chemical spark
micromachining – mechanism - equipment. Electron beam micromachining –
mechanism-process parameters - applications.
Microfabrication - Materials for Microsystems manufacture - Substrates and Wafers,
active substrate materials, silicon and silicon components. Photolithography based
micro fabrication processes - Photo resist development. Additive and subtractive
techniques – CVD – PVD – etching - chemical, plasma - resists removal. Large
aspect ratio micro manufacturing - LIGA, Deep Reactive Ion Etching.
Micro Metrology - Scanning Electron Microscopy, optical microscopy, atomic force
microscope, molecular measuring machine, Micro-CMM, Transmission electron
microscope – principles - applications.