Publication Type : Conference Paper
Publisher : Proceedings-Electrochemical Society, Electrochemical Society
Source : Proceedings-Electrochemical Society, Electrochemical Society, Volume PV 2005-05, p.282-292 (2005)
Campus : Amritapuri
School : School of Engineering
Department : Electronics and Communication
Year : 2005
Abstract :
Cite this Research Publication : J. Gutt, Dr. Sundararaman Gopalan, Brown, G. A., Kirsch, P. D., Peterson, J. J., Gardner, M. I., Li, H. - J., Lysaght, P., Alshareef, H. N., Choi, K., and , “ALD of advanced high-k and metal gate stacks for MOS devices”, in Proceedings-Electrochemical Society, 2005, vol. PV 2005-05, pp. 282-292.